发明名称 |
Automatic wafer processing system and method |
摘要 |
An automatic wafer processing system is modular in format and includes wafer treatment units, storage units and air bearing transport track units which are all operatively interconnected in a coplanar configuration to provide an automated wafer flow path. To facilitate such automated system improved variable width air bearing tracks are provided by flexible strips in slots.
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申请公布号 |
US4352607(A) |
申请公布日期 |
1982.10.05 |
申请号 |
US19800215499 |
申请日期 |
1980.12.11 |
申请人 |
GCA CORPORATION |
发明人 |
LOVELESS, W. L.;TROTT, RICHARD J.;HEATH, ROBERT H.;GLICK, WILLIAM L. |
分类号 |
C30B35/00;H01L21/677;(IPC1-7):B65G51/02 |
主分类号 |
C30B35/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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