| 摘要 |
<p>This device applies a thin layer of liquid, such as photo-sensitive emulsion, to a substrate, such as glass, metal or plastics. The layer can be as thin as one micron and its thickness does not vary with ridges or other surface features of the substrate. The device has applications in the construction of micro-electronic circuit elements. The substrate is mounted on a turntable which revolves at 10,000 r.p.m., and drops of liquid are applied to the substrate surface. An assembly, which delivers gas through a 25 micron slit, makes use of the laminar flow of liquid across a moving horizontal surface to distribute the liquid in an even layer and to remove the excess liquid.</p> |
