发明名称 METHOD OF DEPOSITING METAL ON METAL PATTERNS ON DIELECTRIC SUBSTRATES
摘要 A liftoff process for selectively depositing additional metal layers on an existing metallurgy pattern supported on a dielectric substrate which includes the steps of (1) depositing a melt material on the dielectric substrate which material, after melting, has the characteristic of wetting the substrate surface, but not the existing metallurgy pattern, (2) heating the melt material to convert it to a liquid wherein the material is distributed to cover the dielectric substrate surface, but not the metallurgy pattern, (3) cooling the liquid material to solidify it, (4) depositing a blanket layer of metal over the solidified material and the metallurgy pattern, and (5) dissolving the solidified material in a suitable solvent thereby removing the material and the overlying metal layer portions.
申请公布号 DE3060787(D1) 申请公布日期 1982.10.28
申请号 DE19803060787 申请日期 1980.02.01
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 SCHMECKENBECHER, ARNOLD FRIEDRICH
分类号 H05K3/02;C04B41/51;C04B41/88;C23C14/04;G03F7/00;H01L21/48;H01L23/12;H05K1/03;H05K1/09;H05K3/24;(IPC1-7):05K3/24;01L21/88;01L21/308;01L21/00 主分类号 H05K3/02
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