Sensor device for sensing a gas, method for operating a sensor device for sensing a gas and production method for a sensor device for sensing a gas

摘要

A sensor device for sensing a gas includes a sensing region, and a readout region that is electrically and mechanically connected to the sensing region by way of a connecting web. The readout region, the sensing region, and the connecting web are formed from a substrate, and are isolated from the substrate by a clearance cutout. The sensing region has an ion-conducting region configured to provide a measuring signal dependent on the gas. The readout region (is configured to read out the measuring signal.

主权项

1. A sensor device for sensing a gas, comprising:
a sensing region that includes an ion-conducting region configured to provide a measuring signal based at least in part upon the gas; and a readout region electrically and mechanically connected to the sensing region via a connecting web, and configured to read out the measuring signal; wherein the sensing region, the readout region, and the connecting web are formed from a substrate; and wherein the sensing region, the readout region, and the connecting web are isolated by a clearance.