Method for inspecting polysilicon layer

摘要

A method for inspecting a polysilicon layer includes: radiating excitation light to the polysilicon layer; and detecting a photoluminescence signal generated by the excitation light, wherein average power of the excitation light has a range of 1 W/cm2 to 10 W/cm2, and peak power of the excitation light has a range of 100 W/cm2 to 1000 W/cm2.

主权项

1. A method for inspecting a polysilicon layer, comprising:
radiating excitation light onto the polysilicon layer; and detecting a photoluminescence signal generated in the polysilicon layer by the excitation light, wherein: the excitation light has an average power in a range of 1 W/cm2 to 10 W/cm2; a peak power of the excitation light is in a range of 300 W/cm2 to 500 W/cm2; and the polysilicon layer has a thickness in a range of 1 nm to 300 nm.