| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique advantageous for replacing air in a space between a substrate and a die with other gas.SOLUTION: An imprint device comprises: a die driving section for making a die into contact with resin applied to a substrate or releasing the die from the resin; a substrate driving section for driving the substrate; a hardening section for hardening the resin while the die is in contact with the resin; a control section; and a gas supply section for supplying the gas onto the substrate. The control section performs a substrate driving operation for driving the substrate to the substrate driving section, so that the resin applied to the substrate is positioned below the die. The gas supply section supplies the gas onto the substrate during at least a part of a period of the substrate driving operation, and the control section reduces a distance between the substrate and the die during one part of the period of the substrate driving operation after starting supply of the gas onto the substrate by the gas supply section. |
