发明名称 Method of producing a buried zener diode
摘要 Starting from an n-type silicon substrate, after the photolithographic process for producing the silicon dioxide mask for the base and emitter zone diffusions, a photolithographic process is again carried out after applying a photoresist mask in order to produce a window through which boron is implanted to form a p-doped region. After introducing the p-type doping material necessary for the base diffusion, the p-type base zone and a p<+>-type zone, at whose junction with the subsequently introduced n<+>-type emitter zone the zener breakdown takes place, is driven in in a high-temperature process. <IMAGE>
申请公布号 DE3151437(A1) 申请公布日期 1983.07.07
申请号 DE19813151437 申请日期 1981.12.24
申请人 DEUTSCHE ITT INDUSTRIES GMBH 发明人 HERRMANN,HANS,DIPL.-ING.
分类号 H01L21/265;H01L29/866;(IPC1-7):H01L29/90;H01L21/22 主分类号 H01L21/265
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