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发明名称
摘要
申请公布号
JPS58120653(U)
申请公布日期
1983.08.17
申请号
JP19820016365U
申请日期
1982.02.10
申请人
发明人
分类号
H01L21/677;H01L21/68;(IPC1-7):H01L21/68
主分类号
H01L21/677
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