SYMMETRICAL Z-AXIS MEMS GYROSCOPE

摘要

A novel symmetrical Z-axis MEMS gyroscope is provided. The MEMS gyroscope comprises: a sensor frame arranged parallel to a bottom wafer substrate; a sensor mass body moving relative to the sensor frame and excited at one degree of freedom in an excitation mode; and at least one sensing electrode for sensing the displacement of the sensor mass body at one degree of freedom in a sensing mode by Coriolis force when an external angular velocity is inputted into the sensor mass body, wherein the sensor mass body comprises two mass units, the two mass units are arranged in an axisymmetric form to each other, and the antiphase movements of the two mass units are maintained by an antiphase link device directly or indirectly connected between the two mass units.