| 摘要 |
A radiation sensitive coating composition comprising (a) an alkali soluble resin such as a phenolic resin, poly(p-vinylphenol) or a halogenated poly(p-vinylphenol), (b) poly(2-methylpentene-1-sulfone), and (c) a solvent containing isoamyl acetate as major component can give a positive-type radiation sensitive resist film with good compatibility of the resin components and other good properties.
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