APPARATUS AND METHOD FOR THE EVAPORATION AND DEPOSITION OF MATERIALS USING A ROPE FILAMENT

摘要

An apparatus and method for the evaporation and deposition of materials onto a substrate. A source material may be attached to a rope filament inside a vacuum chamber. A mechanism may be controlled for heating the rope filament and evaporating the source material. Parts for coating may be loaded into a part carrier. A motor mechanism may be controlled for rotating the part carrier. The evaporated source material may be deposited on the parts in the part carrier. The rate of the deposition may be controlled in part by controlling the power source.