Inline measurement of molding material thickness using terahertz reflectance

摘要

A method including emitting a terahertz beam from a light source at a layer of molding material; detecting a reflectance of the beam; and determining a thickness of the layer of molding material. A system including a panel supporter operable to support a panel including a plurality of substrates arranged in a planar array; a light source operable to emit a terahertz beam at a panel on the panel supporter; a detector operable to detect a reflection of a terahertz beam emitted at a panel; and a processor operable to determine a thickness of a material on the panel based on a time delay for an emitted terahertz beam to be detected by the detector.

主权项

1. A method comprising:
emitting a terahertz beam from a light source at a layer of molding material comprising an organic resin on an integrated circuit substrate, wherein terahertz light can penetrate each of the molding material and the substrate producing a first reflectance at an air/molding material interface, a second reflectance at a molding material/substrate interface and a third reflectance from the substrate; detecting the second reflectance of the beam with a time delay; and determining a thickness of the layer of molding material.