| 摘要 |
The present invention is provided with an injector that is attached at a film-formation container opening and with an injector adhesion-prevention material that is inserted into and attached at the opening. An injector raw-material-gas supply path, an injector raw-material-gas supply port, an injector reactant-gas supply path, an injector reactant-gas supply port, an injector inactive-gas supply path, and an injector inactive-gas supply port are demarcated and provided to the injector. An adhesion-prevention material raw-material-gas supply path, an adhesion-prevention material raw-material-gas supply port, an adhesion-prevention material reactant-gas supply path, an adhesion-prevention material reactant-gas supply port, an adhesion-prevention material inactive-gas supply path, and an adhesion-prevention material inactive-gas supply port are demarcated and provided to the injector adhesion-prevention material. The adhesion-prevention material inactive-gas supply path is provided to a gap between an outer-circumferential side of the injector adhesion-prevention material and an inner-circumferential side of the opening such that an inactive gas flows therethrough. |
