| 摘要 |
An integrating IR detector array for imaging is provided in a hybrid circuit with InSb mesa diodes (1, 2 . . . 128) in a linear array, a single J-FET preamplifier (30) for readout, and a silicon integrated circuit multiplexer (34). A reset switch (32) is also provided to reset (charge) all of the diodes to a predetermined level at the end of each line scan. Thin film conductors in a fan-out pattern deposited on an Al2O3 substrate (42) connect the diodes to the multiplexer, and thick film conductors also connect the reset switch and preamplifier to the multiplexer. Two-phase clock pulses ( phi 1 and phi 2) are applied with a logic return signal to the multiplexer through a triax comprised of three thin film conductors deposited one over the other with silicate glass insulation between layers. A lens (14) focuses a scanned image onto the diode array for horizontal read out one line at a time while a scanning mirror (22) provides vertical scan. A cooler (20) maintains the hybrid circuit at a very low (liquid nitrogen) temperature.
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