| 摘要 |
A method and system for real-time calculating the dynamic phase shift signal. The method comprises the following steps: segmenting the medium frequency signals in the testing channel and the reference channel, respectively; reading out the medium frequency signals in the testing channel and the reference channel at the present time period and converting the signals into the digital signals by an A/D conversion, respectively; converting the digital signals in the testing channel and the reference channel obtained at the present time period into the frequency domain signals by Fourier transform, respectively; and synchronously obtaining the accurate frequency at the present time period; obtaining the phase difference by conducting a conjugate calculation on the frequency domain signals in the reference channel and the testing channel at the present time period according to the accurate frequency at the present time period. The method and system for real-time calculating the dynamic phase shift signal can achieve the unattended and reliable real-time phase calculation and output, and a plasma diagnostic method and system using the method and system for real-time calculating the phase shift signal can further reliably achieve the unattended real-time measurement for the electronic density and the current density. |
