| 摘要 |
The force sensor comprises a deformable support 1, and one or more strain gauges 3a,...,3d intended to undergo, under the effect of the deformation of the support 1, an ohmic variation proportional to this deformation. This force sensor consists of an integrated sensitive module, in which sensitive resistive elements 3a,...3d, the compensation components 4 and the interconnection electrical network 5 are integrated with the deformable support 1, according to modern microelectronics techniques. The deformable support 1 is made from a material which has mechanical characteristics which are predetermined as a function of the strains which it is to undergo. Use in particular for measuring bending and shear stresses. <IMAGE>
|
