发明名称 IMAGING APPARATUS AND IMAGING SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide an imaging apparatus capable of clearly visualizing a structure in a scattering body through reflection photography using light.SOLUTION: An imaging apparatus comprises: a pulse light source which emits light; a parallel lighting optical system which converts the light into parallel luminous flux and emits it in two dimensions to a surface of a specimen; a spectral element which spectrally diffuses the light to a wavelength corresponding to each measurement region on the specimen; an optical path branch element which branches an optical path of reflected light from the specimen; a converging optical system which converges reflected light from the specimen; an optical path limiting element which limits the optical path of the reflected light from the specimen; a gate which extracts only a component, delayed by a predetermined time from a peak value of the reflected light, of a time waveform of the reflected light from the specimen; and a detecting element which detects the reflected light from the specimen, a wavelength of light emitted from a pulse light source being spatially and temporally discriminated and reaching the detecting element.SELECTED DRAWING: Figure 2
申请公布号 JP2016170054(A) 申请公布日期 2016.09.23
申请号 JP20150050146 申请日期 2015.03.13
申请人 CANON INC 发明人 YAMADA TOMOHIRO
分类号 G01N21/17 主分类号 G01N21/17
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