发明名称 CUTTING APPARATUS
摘要 PROBLEM TO BE SOLVED: To provide a cutting apparatus in which listing generated by cutting a workpiece and fallen onto first bellows means can be prevented from falling into drainage canals disposed at both sides of the first bellows means.SOLUTION: The cutting apparatus comprises: a holding table 3 for holding a workpiece; cutting means including a cutting blade for cutting the workpiece; cutting water supply means for supplying cutting water to a cutting work portion; cutting feeding means; indexing feeding means; first bellows means 51 and second bellows means 52 each including freely extendable contractible upper and side walls that cover the cutting feeding means; the drainage canals that are disposed at both opposing sides of the first bellows means and the second bellows means and that receive the cutting water; and cutting dust housing means 7 that is disposed at the side of the first bellows means in a cutting and feeding direction and that receives cutting dust. The cutting apparatus further comprises a fall prevention plate 8 that is disposed along the drainage canal and prevents the listing fallen onto the upper wall of the first bellows means from falling into the drainage canal.SELECTED DRAWING: Figure 2
申请公布号 JP2016178106(A) 申请公布日期 2016.10.06
申请号 JP20150054771 申请日期 2015.03.18
申请人 DISCO ABRASIVE SYST LTD 发明人 KATO TAKUYA;FUKUOKA TAKEOMI
分类号 H01L21/301;B24B27/06 主分类号 H01L21/301
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