METHOD FOR PRODUCING DIAMOND-LIKE CARBON LAYERS

摘要

Uncoloured, transparent and self-stress poor diamond-like carbon layers are produced on substrates by discharging plasma from the gas phase. To this effect, a hydrocarbon gas or a mixture of pure hydrogen and hydrocarbon gas are directed to the substrate to be coated which is at room temperature. Around the substrate there is produced an oxygen-free plasma discharge by high frequency excitation, carried by the fed gases themselves. The gases are excited during the plasma discharge dissociated, ionised and accelerated to the substrate.