| 摘要 |
A rotary lapping system and process is disclosed for producing a controlled pressure gradient, including positive and negative lift, when lapping a workpiece coated with an abrasive slurry liquid with a plurality of grinding pads mounted beneath a rotating lap substrate. To obtain positive and negative lift, the grinding pads are tilted with respectively a positive and negative angle of attack, which hydrodynamically reacts with the abrasive slurry liquid to produce the desired lift. The controlled pressure gradient is further varied by decentering the rotation of lap substrate.
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