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经营范围
发明名称
ETCHING METHOD
摘要
申请公布号
JPS6245116(A)
申请公布日期
1987.02.27
申请号
JP19850184142
申请日期
1985.08.23
申请人
HITACHI LTD
发明人
OKABE TSUTOMU
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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