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发明名称
ION IMPLANTING METHOD
摘要
申请公布号
JPS6269666(A)
申请公布日期
1987.03.30
申请号
JP19860224068
申请日期
1986.09.22
申请人
RCA CORP
发明人
DORISU UINIFURETSUDO FURATSUTOREI;SHIEN TEN SUU
分类号
H01L27/092;H01L21/265;H01L21/3215;H01L21/8234;H01L21/8238;H01L27/088;H01L29/78
主分类号
H01L27/092
代理机构
代理人
主权项
地址
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