Turbo molecular pump with improved bearing assembly

摘要

A single ended turbomolecular vacuum pump operable in the free molecular flow pressure range having an improved bearing assembly between the motor rotor and the pump rotor discs is disclosed. The improved bearing assembly which is of the "plain" or "sleeve" liquid lubricated type has a relatively high ratio of journal diameter to bearing axial length. The improved bearing assembly is characterized by improved heat transmission capabilities, high tolerance for misalignment and long life.