| 摘要 |
PURPOSE:To prevent the deterioration of the magnetic characteristics of a magnetic core by forming a nonmagnetic metallic film on a magnetic film. CONSTITUTION:The nonmagnetic oxide film and nonmagnetic metallic film are successively laminated on the surface of the amorphous magnetic film. For example, W-shaped grooves are formed by a dicing saw to an Mn-Zn single crystal ferrite 1 and after the groves are cleaned, a ternary Co-Nb-Zr amorphous film 2 is formed into one layer by a sputtering method. The formation of the Co-Nb-Zr film is executed by an RF sputtering device and a target compsn. is selected for the compsn. of the formed film. An SiO2 film 4 is then sputtered on the amorphous film 2 and a Cr film 5 is sputtered. in succession thereto. Low melting glass 3 is filled into the grooves formed with the amorphous film- SiO2 film-Cr film in succession thereto and after a gap surface is formed by machining and polishing the filled surface, an SiO2 film 11 is formed by an RF device to constitute one core piece. Another core piece is similarly formed and the two core pieces are butted. The butted cores are heated and joined under the pressurization.
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