| 摘要 |
Wafer cassette for processing of silicon wafers which includes a plurality of open supported reinforced wafer dividers for supporting a plurality of wafers in alignment in opposing dividers of the cassette and for automated robotic processing of the wafers while in the cassette. The wafer cassette utilizes an H-bar end with a configured rod reinforced open H-front which is fully functional and strategically located. The dividers are supported by one or two pairs of longitudinal horizontal supports secured to the ends providing for an open area between each of the dividers for passage of liquids during automated processing, and vertical support bars are provided for strengthening of positioning members of the cassette. The rear end includes a downward arch. The processing wafer cassette provides for "on-center" processing where the carrier center of gravity is on-center of the axis of centrifugal wafer processing machinery. Each of the dividers in cross section are geometrically configured for passage of chemicals during processing.
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