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发明名称
METHOD FOR PURIFYING DISILANE
摘要
申请公布号
JPS6325210(A)
申请公布日期
1988.02.02
申请号
JP19860051328
申请日期
1986.03.11
申请人
MITSUI TOATSU CHEM INC
发明人
ITO MASAYOSHI;MIYAGAWA HIROJI;ABE TOSHIHIRO;INOUE KAORU;IKEDA KEIICHI;MURAKAMI MASAMI
分类号
B01D15/04;C01B33/04
主分类号
B01D15/04
代理机构
代理人
主权项
地址
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