MACHINING DEVICE FOR ION BEAM,申请号JP19860239943-传众专利搜索

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发明名称	MACHINING DEVICE FOR ION BEAM
摘要
申请公布号	JPS6394545(A)	申请公布日期	1988.04.25
申请号	JP19860239943	申请日期	1986.10.08
申请人	HITACHI LTD	发明人	OISHI SEITARO;HASHIMOTO ISAO;ARIMATSU KEIJI
分类号	H01J37/30;B23K15/00;H01J27/02;H01J37/08	主分类号	H01J37/30
代理机构		代理人
主权项
地址

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