| 摘要 |
PURPOSE:To make the container part for a test head small, and improve the space factor of a clean room, by installing a means to transfer a test head applying a slide carrying mechanism at the time of measurement. CONSTITUTION:A measurement end arranged on a probe card 3 is brought into electrical contact with the electrode part of a body to be measured, and electric characteristics are measured by a test head 5. A means which transfers the test head 5 by a slide carrying mechanism at the time of measurement is installed, and the probe card 3 is provided with a mechanism which is movable up and down. By transferring the test head 5 applying the slide carrying mechanism at the time of measurement, the container part 17 for the test head can be made small, and the space factor of a clean room can be improved.
|
