| 摘要 |
PURPOSE:To obviate disturbance of Co vapor flow by introducing oxygen from a prescribed angle to a perpendicularly magnetized Co-Co film at the time of forming said film. CONSTITUTION:A nonmagnetic base 9 is supplied from a supply roller 2 and after the perpendicularly magnetized Co-O film is formed by vacuum deposition on a cooling can 1, the base is taken up on a take-up roller 3. The magnetized film is formed by heating Co in a crucible 4 with the electron beam from an electron gun 8 and depositing the generated Co vapor flow by evaporation on the surface of the traveling base 9. The oxygen from an oxygen introducing pipe 7 is introduced to the film so as to attain 0 deg.<phi<=45 deg. incident angle phiof the oxygen with the normal A. Then, the Co vapor flow is deposited by evaporation on the base 9 without being disturbed and, therefore, the recording medium having excellent perpendicular magnetic anisotropy, electromagnetic conversion characteristics and mechanical strength is obtd.
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