| 摘要 |
PURPOSE:To enable Al to attain its mirror finish, by using an unwoven sheet, consisting of very fine fiber, as the polishing cloth and specifically controlling its pressing force so as to prevent a polished surface from generating a scratch. CONSTITUTION:A polishing head 7 comprises a tool electrode 9, buffer material 10 and a polishing cloth 11. The tool electrode 9 is secured to the bottom end of a rotary shaft 6a with the pressing force not exceeding 0.5kg f/cm<2>. The buffer material 10 is a polyester made unwoven fabric, and the polishing cloth 11 is an artificial leather using polyester made very fine fiber with the size of 1 denier or less. These polishing cloth 11 and buffer material 10 provide a quality for an electrolyte and an abrasive grain to penetrate through. While the polishing head uses NaNO3, serving as the passivation type electrolyte, as the electrolyte and alumina of about 0.5mum mean grain size as the abrasive grain.
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