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发明名称
摘要
申请公布号
JPS63195735(U)
申请公布日期
1988.12.16
申请号
JP19870086862U
申请日期
1987.06.04
申请人
发明人
分类号
H01L21/67;H01L21/673;H01L21/68;H01L31/00;H01L31/09;(IPC1-7):H01L21/68
主分类号
H01L21/67
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代理人
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