| 摘要 |
PURPOSE:To detect a force accurately and attain a force detecting sensitivity nearly equal aii in directions of X-Y axis by a method wherein an n-type single crystal substrate with a (211) face, on which a p-type diffusion resistor is formed, is bonded to a deforming body. CONSTITUTION:A detecting element 21 is formed on the surface of an n-Si substrate 18 with a (211) face in such a manner that P-type diffusion layers Rx1-Rx4 detecting a force of X-axis component are formed in the direction that forms an angle of -45 deg. with a <111> axis, a P-type diffusion resistor Ry1-Ry4 detecting a force of Y-axis component are formed in the direction that forms an angle of +45 deg. with the <111> axis, and P-type diffusion resistors Rz1-Rz4 detecting a force of Z-axis component are formed in the direction of the <111> axis. By these processes, even when a center axis 20 of the deformable body 12 deviates from a center axis 19 of the substrate 18, such a interference as a certain detecting element detects a force of the component other than its own is prevented so as to perform a normal detection of a force component. And, the detection sensitivity of the Z-axis direction nearly equal to those of other X and Y-axis can be obtained even though the detection sensitivity of the X and the Y-axis is amplified through a function of the moment of a force transmitting body 14.
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