| 摘要 |
PROBLEM TO BE SOLVED: To provide an imprinting method capable of preventing damage or the like of a mold and stably manufacturing a high accuracy pattern structure, and an imprinting device.SOLUTION: An imprinting device 1 comprises: at least of a mold holding part 2 for holding a mold; a substrate holding part 4 for holding a transfer substrate; a droplet supply part 6 having an ink jet head 7 discharging droplets of a resin to be molded; and a soft-X ray irradiation type static eraser 10. The static eraser 10 is arranged at a location where the mold can be irradiated with the soft-X ray from a lateral to a holding surface of the mold holding part 2, and has a driving part 8 for driving the ink jet head 7 so that at least of the droplet discharge port is not irradiated with the soft-X ray when the soft-X ray is emitted from the static eraser 10. |
