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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6451625(A)
申请公布日期
1989.02.27
申请号
JP19870208304
申请日期
1987.08.24
申请人
FUJITSU LTD;FUJITSU YAMANASHI ELECTRON:KK
发明人
ISAKA HIDEKI;MOCHIZUKI MANABU
分类号
H01L21/312;H01L21/316
主分类号
H01L21/312
代理机构
代理人
主权项
地址
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