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经营范围
发明名称
WAFER CLEANING EQUIPMENT
摘要
申请公布号
JPS6457721(A)
申请公布日期
1989.03.06
申请号
JP19870214343
申请日期
1987.08.28
申请人
CHUKO KASEI KOGYO KK
发明人
KISO KAZUO;SATO HIROSHI;HAMAMOTO KAZUYOSHI
分类号
B08B3/04;H01L21/304
主分类号
B08B3/04
代理机构
代理人
主权项
地址
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