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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPS6477947(A)
申请公布日期
1989.03.23
申请号
JP19870235611
申请日期
1987.09.19
申请人
MITSUBISHI ELECTRIC CORP
发明人
UCHIDA NAOKO
分类号
H01L21/31;H01L21/768;H01L23/522
主分类号
H01L21/31
代理机构
代理人
主权项
地址
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