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发明名称
THICKNESS MEASURING APPARATUS FOR SEMICONDUCTOR LAYER
摘要
申请公布号
JPH01182710(A)
申请公布日期
1989.07.20
申请号
JP19880006632
申请日期
1988.01.14
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
NAKANO YOSHINORI;TSUZUKI NOBUYORI
分类号
G01B11/06
主分类号
G01B11/06
代理机构
代理人
主权项
地址
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