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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH01192133(A)
申请公布日期
1989.08.02
申请号
JP19880018106
申请日期
1988.01.28
申请人
SEIKO EPSON CORP
发明人
KAMATA MINORU
分类号
H01L21/822;H01L21/82;H01L27/04;H01L27/118
主分类号
H01L21/822
代理机构
代理人
主权项
地址
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