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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH01217908(A)
申请公布日期
1989.08.31
申请号
JP19880041893
申请日期
1988.02.26
申请人
FUJITSU LTD
发明人
SATO NORIAKI;NISHIDA KENJI
分类号
H01L21/28;H01L21/768;H01L29/41
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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