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经营范围
发明名称
ANNEALING METHOD
摘要
申请公布号
JPH01216520(A)
申请公布日期
1989.08.30
申请号
JP19880043185
申请日期
1988.02.25
申请人
SONY CORP
发明人
MORITA YASUSHI
分类号
H01L21/20;H01L21/268
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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