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发明名称
PRODUCTION OF SILICON OSCILLATION TYPE STRAIN SENSOR
摘要
申请公布号
JPH01242932(A)
申请公布日期
1989.09.27
申请号
JP19880070361
申请日期
1988.03.24
申请人
YOKOGAWA ELECTRIC CORP
发明人
HARADA KINJI;IKEDA KYOICHI;KUWAYAMA HIDEKI;KOBAYASHI TAKASHI;WATANABE TETSUYA;NISHIKAWA SUNAO;YOSHIDA TAKASHI
分类号
G01L9/00
主分类号
G01L9/00
代理机构
代理人
主权项
地址
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