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发明名称
TARGET FOR FORMING THIN FILM
摘要
申请公布号
JPH01248448(A)
申请公布日期
1989.10.04
申请号
JP19880077510
申请日期
1988.03.30
申请人
TANAKA KIKINZOKU KOGYO KK
发明人
YANAGIHARA HIROSHI
分类号
C23C14/06;C23C14/34;H01J37/305
主分类号
C23C14/06
代理机构
代理人
主权项
地址
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