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发明名称
APPARATUS OF DETECTING IMPERFECTION IN LEAD SHAPE
摘要
申请公布号
JPH01263542(A)
申请公布日期
1989.10.20
申请号
JP19880091473
申请日期
1988.04.15
申请人
HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD
发明人
IKEDA SOHEI;WATANABE YOSHIHISA;KOJIMA AKIO;AKIMOTO YASUHIRO;TSUMEO KOUZABUROU
分类号
G01N21/88;G01N21/93;H05K13/08
主分类号
G01N21/88
代理机构
代理人
主权项
地址
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