发明名称 Semiconductor device having a stress relief film protected against cracking.
摘要 <p>A semiconductor device wherein a stress relief film (12) of polyimide or like substance is formed on the complete surface of a semiconductor chip (10) in order to eliminate inconveniences arising from a difference between the thermal expansion rates of the insulating film and encapsulating plastic of the device. The stress relief film has apertures (13, 13a) formed therein for individually exposing the underlying bonding pads (11) on the chip. In order to avoid the concentration of stresses at the acute or right-angled corners, if any, of each aperture during the fabrication of the stress relief film by the photoetching process, and the consequent cracking of the film, each aperture (13, 13a) is made substantially circular in shape, for example, exactly circular, or rectangular with beveled corners.</p>
申请公布号 EP0349001(A2) 申请公布日期 1990.01.03
申请号 EP19890111961 申请日期 1989.06.30
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 NAKAZAWA, TSUTOMU C-410 TOSHIBA HIYOSHI RYO 4-14-1;ICHIKAWA, KEIJI;OHNO, JUN-ICHI
分类号 H01L21/312;H01L21/60;H01L23/29;H01L23/31 主分类号 H01L21/312
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