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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0268930(A)
申请公布日期
1990.03.08
申请号
JP19880220209
申请日期
1988.09.02
申请人
SONY CORP
发明人
KAYAMA SHIGEKI;HOSHI NAOYA;ITO MASAHIKO
分类号
H01L21/76;H01L21/316
主分类号
H01L21/76
代理机构
代理人
主权项
地址
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