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发明名称
FORMING METHOD OF SINGLE CRYSTAL MAGNESIA SPINEL FILM
摘要
申请公布号
JPH02192755(A)
申请公布日期
1990.07.30
申请号
JP19890012834
申请日期
1989.01.20
申请人
SANYO ELECTRIC CO LTD
发明人
TAGUCHI EIJI;INOUE YASUNORI
分类号
H01L21/205;H01L21/86
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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