THIN FILM BUILDING-UP DEVICE,申请号JP19890014998-传众专利搜索

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发明名称	THIN FILM BUILDING-UP DEVICE
摘要
申请公布号	JPH02197576(A)	申请公布日期	1990.08.06
申请号	JP19890014998	申请日期	1989.01.26
申请人	CANON INC	发明人	KAWAKAMI SOICHIRO
分类号	C23C16/50;C23C16/27;C23C16/511	主分类号	C23C16/50
代理机构		代理人
主权项
地址

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