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发明名称
SEPARATION OF ETCHING PRODUCT FITTED WITH MULTIPLANE AND DEVICE
摘要
申请公布号
JPH02197584(A)
申请公布日期
1990.08.06
申请号
JP19890016999
申请日期
1989.01.25
申请人
MITSUI HIGH TEC INC
发明人
FUJITA KATSUFUSA;HIGUCHI MASAYUKI
分类号
C23F1/00;H01L23/50
主分类号
C23F1/00
代理机构
代理人
主权项
地址
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