发明名称 LOW LOSS MULTILEVEL SILICON CIRCUIT BOARD
摘要 The arrangement incorporates multiple levels of patterned conductors. Upper and lower patterned conductors are situated on an insulation- coated, monocrystalline silicon substrate. Upper and lower, higher resistivity, polycrystalline silicon layers, in turn, are situated on the first level upper and lower patterned conductors, respectively. Second level upper and lower patterned conductors are situated over the upper and lower polycrystalline silicon layers. Further levels of patterned conductors in the circuit board may be provided by iteratively forming on the board polycrystalline silicon layers and patterned conductors. Conducting feedthroughs in the circuit board provide electrical communication between various patterned conductors.
申请公布号 KR900006018(B1) 申请公布日期 1990.08.20
申请号 KR19850005437 申请日期 1985.07.29
申请人 GENERAL ELECTRIC CO. 发明人 CARLSON RICHARD O.;GLASCOKE HOMER H. JR.;ROGLAN JAMES A.;WEBSTER HAROLD F.
分类号 H01L23/522;H01L21/70;H01L21/768;H01L23/12;H01L23/14;H01L23/538;H01L27/13;H05K3/46 主分类号 H01L23/522
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