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发明名称
PRODUCTION OF SILICON DEVICE
摘要
申请公布号
JPH02274881(A)
申请公布日期
1990.11.09
申请号
JP19890095234
申请日期
1989.04.17
申请人
C UYEMURA & CO LTD
发明人
SHIMOMURA TOMOJI;KUZUHARA AKIRA;NAKAMURA TAICHI;UCHIDA HIROKI
分类号
C23C18/18;C23C18/36
主分类号
C23C18/18
代理机构
代理人
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